DC / Parametric Probing
CM210 / CM220 / CM230:
CheckMate 200mm Manual & Joystick Controlled Probe Stations
· 10” Cross-roller bearing for smooth, stable operations, and load support
· Leadscew-driven contact / separate control with hard “down stop” for repeatability
· Choose from nickel, steel, or aluminum platen
· 2” Platen range with lock
· Pneumatic check contact / separate switch
· 4-Point platen support and lift
· 2” Base plate for superior rigidity
The CM210 has manual control of both wafer and microscope stages and is pre-wired for easy in-the-
field upgrade to motorized control. The CM220 has joystick controlled motorized movement of both
the microscope and wafer stage. The CM230 has a joystick unit with precision dials to control both
the microscope and wafer stages.
The CM330 CheckMate Probe Station shown at the right includes a 300mm X-Y wafer stage, the
standard 300 series joystick with precision thumbwheel control, Signatone's Computer Aided Probe
(CAP-946) with 0.5 micron resolution, and a laser mounted on a high powered Motic microscope.
Whether your need is for failure analysis, product engineering, design/debug or any of the many
probing applications that Signatone addresses, the CheckMate Probe Station can be configured to
meet your needs with accuracy, stability, ease-of-use, and a wide assortment of options and
CheckMate 300mm Precision Joystick Controlled Probe Stations
The CM240 uses a PC and has programmable capability for the microscope and up to four CAP
Probes (Computer Aided Probes) using the Signatone Solutions Windows based Software.
The CM250 Probe Station is semi-automatic with “step and repeat” programmability along with many
other functions and accessories that offer the user an ergo-perfect work station.
CM240 / CM250:
CheckMate 200mm Software Controlled & Semi-Automatic Probe Stations
Semiconductor Characterization System
CheckMate 150mm Semi-Automatic Probe Stations
The CM460 is a 6" Semi-Automatic Probe Station, rich in features and capability, that offer a human
engineered interface to make operation easy and intuitive. CM460 Systems can be configured for a
variety of applications including microwave probing, low current (femtoamp) probing, thermal probing,
design/debug, failure analysis, product engineering and many other probing applications.
Systems incorporate a proprietary linear induction motor and an optical feedback positioning system
to drive and control the wafer stage. This marriage of sophisticated technologies has given Signatone
a leading edge in performance, reliability and accuracy. All systems include automated wafer
stepping controlled via the Signatone Solutions Windows software and motorized theta with a quick
two-point align feature. Options include programmable motorized microscope movement, auto focus,
computer aided probes, on screen video, a unique joystick/thumbwheel control unit, and many other
The local chambered WaveLink probe station from Signatone provides the perfect probing foundation for parametric testing with the 4200-SCS.
Integrated with the 4210-MMPC-L cabling system allows seamless parametric testing with up to 4 probes. The Wavelink local chamber probe
station is available in 200mm or 300mm; manual or semiautomatic configurations. The removable panels of the local chamber allow maximum
versatility of probe placement and integration with the 4225-RPM. A variety of linear motion micropositioners assure micron and sub-micron
placement of the probe tips. Probe tips are guarded to within 1mm of the contact. The guarded triaxial chuck is available in ambient, heated or
For parametric testing that maximizes the productivity of technicians and engineers in research
and development, the Signatone combines lab-grade DC and pulse device characterization,
real-time plotting, and analysis with high precision and sub-femtoamp resolution in a fully
integrated characterization system.
Signatone's Tripak Triaxial Technology:
Provides Low Current Analysis for Measuring fA Currents @ Temperature
Signatone Low Current System, combined with a suitable parametric instrument such as the
HP4156A, allows measurements of current to the femtoamp range at temperatures between
ambient and 300°C for tests which may predict reliability and future performance such as:
· MOS device sub threshold off currents (click on graph at the right)
· Oxide voltage and charge-to-break-down testing
· Hot carrier degradation and impact ionization current
The Triaxial Package components are:
· A triaxially driven room temperature chuck or hot chuck
· Easily retrofitted to Signatone 6 and 8 inch Probe Stations.
· A triaxially driven probe tip holders engineered to operate with a 300°C chuck
· A suitable electronically shielded dark box
Precision In-Line Micropositioner
Precision In-Line Micropositioner
The basic design of the SP-100 is derived from Signatone's top-of-the-line SP-150 Micropositioner. The main
advantage of this design is the base-mounted micrometers, which effectively decouples hand-induced vibration
from the probe. The inline design also reduces the clearance with adjacent positioners, which increases the
number of probes that can be used on the probe station.
The SP-100 has been optimized for probing features sizes down to1µ. Available in Pivot (P) and Vertical (S)
Head styles, the SP-100 is a significant improvement in probe placement technology.
The SP-150 Inline Micropositioner is Signatone's most stable and precise micropositioner for submicron
geometry probing. All three axes are mechanical isolated from the movement knobs, providing zero user
induced vibration. The X and Y knobs are both located at the rear of the micropositioner so that positioners can
be positioned closely together without interference from a knob located on the side. The SP-150 Inline
Micropositioner is available with a pivot assembly which allows probe tip holders to be quickly positioned in the
Z axis, prior to using the fine Z positioning movement for final touchdown.
The CAP-946 Computer-Aided Positioner is a motorized micropositioner that is designed to be controlled by
any of the Signatone Solutions Computer Aided Probing Systems or by the Signatone CM4-j Joystick /
thumbwheel controller. CAP-946 micropositioners provide "hands-off" probing and can take advantage of the
programmable capabilities that computer aided probing offers.
Signatone Solutions Software is a Windows-based, icon-driven software user interface which supports live
video, Point-N-Shoot, multi-axis tracking, and a "pseudo align" feature for improved positional accuracy.
The Signatone S-750 Joystick Micropositioner features a 9:1 motion ratio and a scan area of 0.10" x 0.180". It
is available with or without the removable extension rod. The body is made of mold injected Delrin and it is
mounted onto a strong magnetic metal base. The S-750 Joystick Micropositioner is capable of rapidly
establishing contact with probing targets as small as 1 mil.
The S-750 Joystick Micropositioner was developed specifically for contacting larger area structures (pads). Its
small size and simple design make it easy to place multiple probes down on one device when platen space is
limited. A large X-Y scanning area is augmented by the adjustable "Z" movement of the probe. The spring
probe clamp is electrically isolated from the positioner body, and is connected to an 18" wire termination with
a male pin jack connector installed.
CWI Technical Sales Phone: 732-536-3964 Fax: 732-536-0495 firstname.lastname@example.org