S-Cubed is a Leading Supplier of Photoresist Process and Cleaning Equipment. The S-Cubed Engineering team is comprised of accomplished engineers and entrepreneurs with a long history of designing and manufacturing innovative equipment for the semiconductor and allied industries.
Flexi
Photoresist Processing System
- Spin Axis is always within one revolution in absolute
terms of programmed velocity and trajectory
- +/-% temperature uniformity for thermal modules
- Demonstrated greater than 1000 hrs MTBF
- Two programmable dispensing arms
- Substrates up to 200mm
- Multiple substrates sizes without change
- Unlimited process storage capabilities
Photoresist Processing
Force 300
Photoresist Coater
- Interchange operation 200 and 300mm wafers
- FOUP, FOSB or Cassettes
- Up to 4 photoresist dispensers standard
- To and bottom side EBR, plus bowl rinse
- Unique EBR dispense method to substatially shorten
EBR process times for thickner photoresist films
- Unique Hot Plate module eliminates problems of oven
contamination because of solvent/resist vapor
condensate
- Hot plates no longer require regular cleaning of bake
chamber
Flexi Basic
Low Cost Photoresist Spin Processing Systems
- 2 Thermal Modules
- 1 dispense per dispense arm, two dispense arms
- Adjustable dispense height
- All process actuations are pneumatic and adjustable
(not programmable)
- +/-1% temperature uniformity for thermal modules
- Demonstrated greater than 1000 hrs MTBF
- High performance, Low cost
FotoFab
Manually Loaded System with Automated Process Steps
- Programmable Photoresist Dispensers
- Programmable, Oscillating Dispense Arms
- Spin Bowl Exhaust Level
- Hot Plate and Cold Plate
- PC Programmability and Recipe Storage
- Integrated Wafer Centering Device
- Programmable EBR Dispenser
- Built-in Bubble-free Dispense, up to 3 Fluids available
- Built-in vacuum source
MicroFab
Manually Loaded Table Top Spinner
- Precise Spin Speed and Acceleration Control
- Controlled by a Net Book with a Fully Integrated GUI
Related Products
CWI Technical Sales Phone: 732-536-3964 Fax: 732-536-0495 sales@cwitechsales.com
· Ultra high reliability
· Small footprint
· Color LCD touchscreen
· Unlimited process storage capabilities
· Remote data collection and control
· Stacked thermal modules
· Multiple size substrates without change
· Servo motion control
· Process substrates up to 300 mm
· Proven modular design
· Lowest cost of ownership
· Production worthy tools
