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ResMap 168
Auto-Cassette Loading
The ResMap 168 is the fastest and smallest Auto-Cassette Loading Resistivity Mapping System. The table-top unit can load 4 inch to 8 inch wafers from a cassette, and handle 2 inch to 8 inch wafers manually.
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KLA Tenor Candela Optical Surface Analyzers
2 inch to 8 inch Manual Load
The ResMap 178 is the fastest Manual Loading Resistivity Mapping System. The table-top unit can handle 2 inch to 8 inch wafers.
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Nanoscale Optical Profiler
SMIF Loading
The ResMap 268 is the fastest and smallest Fully Automated SMIF Loading Resistivity Mapping System. The table-top unit can load 6 inch and 8 inch wafers from a SMIF pod, as well as, measure 2 inch to 8 inch wafers when manually loaded.
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Tamar Technology
300mm Manual Load
The ResMap 273 is the only Manual Loading Automatic Resistivity Mapping System for up to 300mm round or 200mm x 200mm square substrates.
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FOUP Loading, Dual Probe
The ResMap 468 is the fastest and smallest stand-alone 200mm SMIF Loaded Resistivity Mapping System with Selectable Dual Probe via Recipe, Notch Sensor, and Auto Probe Conditioning. e Conditioning.
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X-Ray Tomography Systems
Flat Panel Manual Load
The ResMap 188 is the only Manual Loading Automated Resistivity Mapping System for up to 200mm x 200mm square substrates.
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Bump Inspection
Defect Inspection
Dicing Inspection
Nanoscale Profilers
Probe Mark Inspection
Surface Analysis