Metrology > Optical & Stylus Profilers

Products

 

OPTICAL PROFILERS

MicroXAM-800

A white light interferometer-based optical profiler that measures nanometer-level features with phase scanning interferometry (PSI), and sub micron to millimeter features with vertical scanning interferometry (VSI).

Zeta-20

A fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. Powered by ZDot™ technology that simultaneously collects high-resolution 3D data and a True Color infinite focus image.

Zeta-300

The Zeta-300 provides 3D metrology and imaging capability, combined with an integrated isolation table and configuration flexibility to handle larger samples. 

Zeta-388

The Zeta-388 provides 3D metrology and imaging capability, combined with an integrated isolation table and a cassette-to-cassette wafer handling system for fully automated measurements.

 

STYLUS PROFILERS

Alpha-Step D-500

The Alpha-Step D-500 stylus profiler is capable of measuring 2D step heights from a few nanometers up to 1200µm. The D-500 also supports 2D measurements of roughness, bow and stress for R&D and production environments.

Alpha-Step D-600

This stylus profiler is capable of measuring 2D and 3D step heights from a few nanometers to 1200µm. The D-600 also supports 2D and 3D measurements of roughness, plus 2D bow and stress for R&D and production environments. 

P-7

The P-7 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.

P-17

The P-17 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow and stress for scans up to 200mm without stitching.

P-170

A cassette-to-cassette profiler offering step height measurement capability for steps from a few nanometers to one millimeter, for production environments. Supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching.

HRP®-260

A high-resolution, cassette-to-cassette stylus profiler offering step height measurement capability from a few nanometers to 300µm. Supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching.

 

NANOMECHANICAL TESTERS

iNano®

The iNano® nanoindenter makes measuring thin films, coatings and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing.

iMicro

The iMicro nanoindenter makes measuring hard coatings, thin films, and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing.

Nano Indenter® G200

Designed for nanoscale measurements during characterization and development of a wide range of materials. Fully upgradeable, extendible, and production-proven platform with automated hardness measurement for quality control and assurance labs.

NanoFlip

The NanoFlip nanoindenter measures hardness, modulus, yield strength, stiffness and other nanomechanical tests with high accuracy and precision under both vacuum and ambient conditions.

InSEM® HT

The InSEM ® HT (high temperature) measures hardness, modulus and stiffness at high temperature by independently heating both the tip and sample in a vacuum environment.

T150 UTM

The T150 UTM tensile tester measures the time-dependent response of strain rate-sensitive materials. 

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