Test & Measurement > Probe Stations

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PROBE SYSTEMS

 

Manual Probe Systems

TS150
  • 150mm Air Bearing Stage

  • Compact, Rigid Platen

  • 90 Degree Optic Tilt

  • Coax, Triax & Thermal Chucks available

TS150-THZ
  • 150mm Air Bearing Stage

  • 1um repeatable platen lift

  • 10mm Fine Chuck Z adjust

  • Extremely rigid platen design

  • Multiline TRL Calibration

TS200
  • 200mm Air Bearing Stage

  • Compact, Rigid Platen

  • 90 Degree Optic Tilt

  • Coax, Triax and Thermal Chucks available

TS300
  • 300mm Air Bearing Stage

  • Compact, Rigid Platen

  • 90 Degree Optic Tilt

  • Coax, Triax and Thermal Chucks available

 

Semi-Automated Systems

TS2000

Automated 200 mm probe system designed for Failure Analysis, Design Verification, IC engineering, Wafer Level Reliability as well as special requirements for MEMS, High Power, RF & mmW device testing.

TS2000-SE

Automated engineering probe system can be configured at extended temperature ranges from -60°C to +300°C. Equipped with automated single wafer loader for convenient wafer swap at any temperature.

TS3000

Automated 300 mm probe system, specifically designed for Product Engineering, Failure Analysis, Design Validation, Wafer Level Reliability and RF & mmW applications.

TS3000-SE

Equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements. It can be configured at extended temperature ranges from -60°C to +300°C.

Skywalker Line Wafer/Chip Probers

VCSEL or Photodetectors:

  • Low Noise and Leakage DC

  • LIV Sweep Test

  • NF and FF Measurements

  • Capacitance

  • Spectrum

LED Probers and Testers for:

  • Wafer Level Test

  • Die Level Test

  • Chip Level Test

 

Fully-Automated Systems

TS2500-RF

A 200 mm fully automatic probe system designed specifically to address the need for advanced RF device testing at the production level. Compatible with all MPI system accessories.

TS2500-HP

A 200 mm fully automatic probe system designed to address the need for advanced high power device testing at the production level. Compatible with all MPI system accessories.

TS3500-SE + WaferWallet™

A 300 mm probe station with the added fully-automated capability by configuring or upgrading with MPI’s unique WaferWallet™, significantly reducing the customer's overall cost of test.

 

IMPACT™ Test Solutions for Universities

ITS50-COAX

Complete Test Package

  • 50mm Coax Chuck

  • Microscope

  • 4x MP25 DC Micropositioners

  • 4x Coax Probe Arms

  • Tungsten Probe Tips

ITS50-TRIAX

Complete Test Package

  • 50mm Triax Chuck

  • Microscope

  • 4x MP25 DC Micropositioners

  • 4x Coax Probe Arms

  • Tungsten Probe Tips

ITS50-RF26

Complete Test Package

  • 50mm Triax RF Chuck

  • Microscope

  • 2x MP40 DC&RF Positioners

  • 2x RF E/W Probe Arms

  • 2x 26GHz TITAN RF Probes

  • 2x 26GHz RF Cables

  • AC-2 Calibration Substrate

  • QAlibria Software

ITS150-COAX

Complete Test Package

  • 150mm Coax Chuck

  • Microscope

  • 4x MP25 DC Micropositioners

  • 4x Coax Probe Arms

  • Tungsten Probe Tips

ITS150-TRIAX

Complete Test Package

  • 150mm Triax Chuck

  • Microscope

  • 4x MP25 DC Micropositioners

  • 4x Coax Probe Arms

  • Tungsten Probe Tips

ITS150-RF26

Complete Test Package

  • 150mm Triax RF Chuck

  • Microscope

  • 2x MP40 DC&RF Positioners

  • 2x RF E/W Probe Arms

  • 2x 26GHz TITAN RF Probes

  • 2x 26GHz RF Cables

  • AC-2 Calibration Substrate

  • QAlibria Software

 

MPI TITAN™ RF Probes

26GHz Probe : T26
  • DC to 26GHz

  • 50Ohm Impedance

  • <0.4dB Insertion Loss

  • >16dB Return Loss

  • 50um to 1250um

40GHz Probe : T40
  • DC to 40GHz

  • 50Ohm Impedance

  • <0.6dB Insertion Loss

  • >18dB Return Loss

  • 50um to 500um

50GHz Probe : T50
  • DC to 50GHz

  • 50Ohm Impedance

  • <0.6dB Insertion Loss

  • >17dB Return Loss

  • 50um to 250um

67GHz Probe : T67
  • DC to 67GHz

  • 50Ohm Impedance

  • <0.8dB Insertion Loss

  • >16dB Return Loss

  • 50um to 250um

110GHz Probe : T110
  • DC to 110GHz

  • 50Ohm Impedance

  • <1.2dB Insertion Loss

  • >14dB Return Loss

  • 50um to 250um

 

System Accessories

MPI MicroPositioners

MPI offers a wide variety of backlash-free MicroPositioners to address every operational and measurement condition. These vary from small footprint to micrometer driven high resolution positioners for RF and mmW applications.

DC & RF Probe Arms

MPI offers a complete portfolio of Probe Arms such as:

  • Standard as coaxial, triaxial, and high-voltage versions

  • Kelvin

  • RF

Calibration Substrates

The AC-series of calibration substrates offers up to 26 sets of standards for wafer-level SOLT, LRM probe-tip calibration for GS/SG and GSG probes. 

RF Calibration Software (QAlibria)

By implementing the progressive disclosure methodology and realizing intuitive touch operation, QAlibria® provides crisp and clear guidance to the RF calibration process.

RF / Microwave Cables

MPI offers an excellent selection of flexible cables and accessories for RF and mm-wave measurement applications for complete RF probe system integration.

RF / mmWave Adapters

High-quality RF and high end mm-wave adapters are offered to address challenges of regular system reconfiguration and integration with different type of test instrumentation.

 

LED / VCSEL / Photodiode

LED Probers and Testers for:

  • Wafer Level Test

  • Die Level Test

  • Chip Level Test

Skywalker Line Wafer/Chip Probers

VCSEL or Photodetectors:

  • Low Noise and Leakage DC

  • LIV Sweep Test

  • NF and FF Measurements

  • Capacitance

  • Spectrum

 

Device Characterization

TS200-SE

The TS200-SE incorporates the ShieldEnvironment™ providing optimal EMI shielding which allows ultra-low noise device on-wafer measurements for many applications.

TS2000-SE

Automated engineering probe system can be configured at extended temperature ranges from -60°C to +300°C. Equipped with automated single wafer loader for convenient wafer swap at any temperature.

TS3000-SE

Equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements. It can be configured at extended temperature ranges from -60°C to +300°C.

 

High Power Systems

TS150-HP & TS200-HP

Designed for on-wafer high power device testing, the TS150-HP and TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution.

TS2000-HP

The automated TS2000-HP provides on-wafer high power device measurement over wide-temperature range and measurement capability up to 3 kV (triax) / 10 kV (coax) and 600 A (pulsed).

TS2000-DP

Designed with fully-integrated DarkBox which allows light sensitive measurement in temperature range from 20°C  and measurement capability up to 300°C to 10kV and 600A.

TS2500-HP

A 200 mm fully automatic probe system designed specifically to address the need for advanced high power device testing at the production level.

TS3000-HP

The automated TS3000-HP provides on-wafer high power device measurement over wide-temperature range and measurement capability up to 3 kV (triax) / 10 kV (coax) and 600 A (pulsed).

High Current Probes
  • Replaceable Probe Tips

  • Multi-Fingers Configuration

  • 300um pitch, 70um width

  • Support up to 200A pulse

  • RF positioner mount

 

mmWave

TS150-THZ
  • 150mm Air Bearing Stage

  • 1um repeatable platen lift

  • 10mm Fine Chuck Z adjust

  • Extremely rigid platen design

  • Multiline TRL Calibration

TS200-THZ

A 200 mm probe system designed to provide accurate tests for mm-wave, THz and automated impedance tuner applications with best possible measurement directivity.

TS150-THz mmW Antenna

An industry-first automated system for wafer-level antenna characterization at mmW frequency range and beyond for 5G and automotive applications

 

Failure Analysis

TS200
  • 200mm Air Bearing Stage

  • Compact, Rigid Platen

  • 90 Degree Optic Tilt

  • Coax, Triax and Thermal Chucks available

TS200-SE

The TS200-SE incorporates the ShieldEnvironment™ providing optimal EMI shielding which allows ultra-low noise device on-wafer measurements for many applications.

TS2000

Automated 200 mm probe system designed for Failure Analysis, Design Verification, IC engineering, Wafer Level Reliability as well as special requirements for MEMS, High Power, RF & mmW device testing.

TS2000-SE

This automated probe system can be configured at extended temperature ranges from -60°C to +300°C. Equipped with automated single wafer loader for convenient wafer swap at any temperature.

TS300
  • 300mm Air Bearing Stage

  • Compact, Rigid Platen

  • 90 Degree Optic Tilt

  • Coax, Triax and Thermal Chucks available

TS300-SE

The TS300 ShielDEnvironment™ is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities on 300 mm wafer in a temperature range from -60 to +300°C. 

TS3000

Automated 300 mm probe system, specifically designed for Product Engineering, Failure Analysis, Design Validation, Wafer Level Reliability and RF & mmW applications.

TS3000-SE

Equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements. It can be configured at extended temperature ranges from -60°C to +300°C.

 

Wafer Level Reliability

TS2000-SE

This automated probe system can be configured at extended temperature ranges from -60°C to +300°C. Equipped with automated single wafer loader for convenient wafer swap at any temperature.

TS3000-SE

Equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements. It can be configured at extended temperature ranges from -60°C to +300°C.

TS3500-SE + WaferWallet™

A 300 mm probe station with the added fully-automated capability by configuring or upgrading with MPI’s unique WaferWallet™, significantly reducing the customer's overall cost of test.

 

Silicon Photonics

TS2000-SiPH

The TS2000-SiPH is an automated 200 mm probe system designed for characterizing silicon photonics devices. It features an ergonomic design and footprint as well as extended flexibility.

TS3000-SiPH

The TS3000-SiPH is an automated 300 mm probe system designed for characterizing silicon photonics devices. It features an ergonomic design and footprint as well as extended flexibility.