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OPTICAL PROFILERS

Profilm3D
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The Filmetrics® Profilm3D® and Profilm3D-200 optical profilometers are affordable, non-contact, white light interferometry-based (WLI) 3D surface topography measurement systems. The Profilm3D series measures nanometer- to millimeter-scale surface features, producing high-resolution 3D surface data and TotalFocus™ images (color 3D images with a depth-of-field equal to the vertical scan distance). 

Zeta-20
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A fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. Powered by ZDot™ technology that simultaneously collects high-resolution 3D data and a True Color infinite focus image.

Zeta-300
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The Zeta-300 provides 3D metrology and imaging capability, combined with an integrated isolation table and configuration flexibility to handle larger samples. 

Zeta-388
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The Zeta-388 provides 3D metrology and imaging capability, combined with an integrated isolation table and a cassette-to-cassette wafer handling system for fully automated measurements.

 

STYLUS PROFILERS

Alpha-Step D-500
KLA D500_1

The Alpha-Step D-500 stylus profiler is capable of measuring 2D step heights from a few nanometers up to 1200µm. The D-500 also supports 2D measurements of roughness, bow and stress for R&D and production environments.

Alpha-Step D-600
KLA D600_1

This stylus profiler is capable of measuring 2D and 3D step heights from a few nanometers to 1200µm. The D-600 also supports 2D and 3D measurements of roughness, plus 2D bow and stress for R&D and production environments. 

P-7
KLA P-7

The P-7 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.

P-17
KLA P-17

The P-17 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow and stress for scans up to 200mm without stitching.

P-170
KLA P-170

A cassette-to-cassette profiler offering step height measurement capability for steps from a few nanometers to one millimeter, for production environments. Supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching.

HRP®-260
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A high-resolution, cassette-to-cassette stylus profiler offering step height measurement capability from a few nanometers to 300µm. Supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching.

 

NANOMECHANICAL TESTERS

iNano®
KLA iNano

The iNano® nanoindenter makes measuring thin films, coatings and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing.

iMicro
KLA iMicro

The iMicro nanoindenter makes measuring hard coatings, thin films, and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing.

Nano Indenter® G200
KLA G200

Designed for nanoscale measurements during characterization and development of a wide range of materials. Fully upgradeable, extendible, and production-proven platform with automated hardness measurement for quality control and assurance labs.

NanoFlip
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The NanoFlip nanoindenter measures hardness, modulus, yield strength, stiffness and other nanomechanical tests with high accuracy and precision under both vacuum and ambient conditions.

InSEM® HT
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The InSEM ® HT (high temperature) measures hardness, modulus and stiffness at high temperature by independently heating both the tip and sample in a vacuum environment.

T150 UTM
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The T150 UTM tensile tester measures the time-dependent response of strain rate-sensitive materials.