Front End > Wet Process

WPS_logo.png

Fully-Automated Wet Bench

 

Model WPS-FA-RA-300/450

  • Fully-automated 300mm/450mm front and rear access batch chemical wet process system with 300mm and 450mm process capability

  • Incorporates Y/Z linear servo positioning systems which provides a wide range of movement controls to accommodate various process needs

Semi-Automated Wet Benches

 

Model WPS-1000-FA-A-2002-3001

Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System

  • Incorporates Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations

  • Designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities

  • The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements

Model WPS-700-RA-A-150-200-1

Rear Access Semiconductor Wet Bench 150 MM Batch Chemical Process System

  • Incorporates Linear Servo Positioning Systems for two process vessel front to rear configurations which use independent PLC controllers for each process module

  • All modules operated independently of each other and are provided with a UPS for additional product safety in the event of power outages

  • Operator interface is via a Colored Touch Screen located on front control panel

  • PLC based controllers permit both manual and automated operation of the Servo Positioning System

Model WPS-600-PVC-C, Y/Z/ Theta Series

Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System

  • Incorporates Linear Servo Positioning Systems with a Rotary Theta Axis for multiple process vessel configurations

  • Designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities

  • Theta axis allows for front and rear process vessel configuration

  • Positioning system movement is performed by independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements

Model WPS-400PVC-C, Y/Z Series

Semiconductor Wet Bench Front and Rear Access Batch Chemical Process System

  • Incorporates Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations

  • Designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities

Model WPS-800-FA-A-2001-3001

Semiconductor Wet Bench Front Access Batch Chemical Process System

  • Incorporates Linear Pneumatic Positioning Systems for two process vessel configuration

  • Designed to accommodate single 200 MM and 300MM wafer cassette to provide broader process capabilities

  • Positioning system movement is performed by pneumatic linear actuators with flow precision controls for smoother movements that are protected by Gortex Bellows

Model WPS-900-FA-A-2002-3001

Semiconductor Wet Bench Front Access Batch Chemical Process System

  • Incorporates Rotary Servo or Pneumatic Positioning Systems for two process vessel configuration or multiple process vessel configurations

  • Designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities

 

Manual Wet Benches

Front View

Lip Exhaust

Secondary Exhaust Slots

Overview
  • Through wall installation in Class 10 Clean Room at customer’s facility

  • Recessed deck with 360° process vessel lip exhaust and secondary exhaust slots for complete fume capture

 

Acid-Base Wet Benches

Model WPS-VLF-800-FA-FM-PVC-C

  • Factory mutual approved noveon PVC-C vertical laminar

  • All processed in class 10 environments

  • Flow front access wet process system designed to process Si and GaAs wafers

  • Constructed out of FM approved CPVC, PVC-C, (PVDF) Kynar or (ECTFE) Halar construction, allowing corosion resistance to acids and bases

  • Built with modular recess deck with 360° process vessel lip exhaust and secondary exhaust

Solvent Wet Benches

 

Model WPS-800-VLF-FM-SS

  • Designed to process Si and GaAs wafers in a class 10 environment

  • Constructed out of FM Approved Stainless Steel for resistance to all solvent processes and fire

  • Safety and ergonomics are main aspects in the system design

  • Designed to be installed through the wall with the control panel flush to the wall

  • All DI Water fluid components are accessible through removable front and/or rear access panels

  • All electrical components are accessible through removable front and/or rear access panels and incorporate interlock switches with EPO interface via keyed By-Pass switch for safety

Chemical Blend Dispense Systems

 

Overview

  • Wafer Process Systems Inc. manufactures world class wet process equipment using precision fluid controls and components for all wet process applications

  • Applications include bulk chemical, delivery, point of use chemical recirculation and filtration, point of use chemical metering, and chemical waste recovery

  • All chemical wetted components are PVDF, PTFE Teflon, PFA Teflon or Quartz

Bulk Chemical Handling & Fluid Control

Point of Use Chemical Filtration & Fluid Control

CALL US

Tel: 732-536-3964

 HOURS

Mon - Fri: 8am - 6pm

OVER 40 YEARS EXPERIENCE

Located in Central New Jersey, CWI has been representing tier-one equipment suppliers for over 40 years.

PRODUCTS

- Test & Measurement

- Wafer Processing

- Metrology/Inspection

- Backend Operations

- Failure Analysis

VISIT US

704 Ginesi Drive, Suite 11A
Morganville, NJ, 07751

© 2023 by Dr. Repair. Proudly created with Wix.com