METROLOGY & INSPECTION

Nanomechanical Testers
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Automated Optical Inspection

  • 2D or 3D

  • Wafer, Diced on Frame, Substrates, Modules, Wire Bonds, PCB

KLA
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Optical Profilers

  • Transparent or Opaque

  • Smooth to Rough

  • Low to High Reflectivity

  • Sub-nm to mm

KLA
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Stylus Profilers

  • Step Height

  • Roughness

  • Bow & Stress

  • R&D and Production

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Film Thickness/Trench Depth

  • Ultra Thin & Thick Films

  • Multi-Layer Films Stacks

  • Depth, CDs, Profiles

KLA iMicro
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Nanoindenters/
Nanomechanical Testers

  • Indentation

  • Hardness

  • Scratch Testing

  • Universal Nanoscale Testing