

METROLOGY & INSPECTION
Automated Optical Inspection
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2D or 3D
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Wafer, Diced on Frame, Substrates, Modules, Wire Bonds, PCB
Optical Profilers
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Transparent or Opaque
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Smooth to Rough
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Low to High Reflectivity
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Sub-nm to mm
Film Thickness/Trench Depth
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Ultra Thin & Thick Films
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Multi-Layer Films Stacks
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Depth, CDs, Profiles
Nanoindenters/
Nanomechanical Testers
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Indentation
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Hardness
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Scratch Testing
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Universal Nanoscale Testing