FRONT END SOLUTIONS

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Coaters / Developers

  • Industry Proven

  • Extremely reliable

  • Manual, Semi-Auto and Production

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Mask Aligner / Exposure

  • Frontside and Backside

  • Variety of Sizes and Wattage

  • Manual, Semi-Auto and Cassette Loaded

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Wet Process

  • Completely new benches or Field Modifications

  • Chemical Blend Systems

  • IPA Dyers

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Rapid Thermal Process

  • 2" to 8"

  • Manual or Cassette Loading

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Sputter

  • Integrated Process Control

  • Metals or Dielectrics

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Asher / Descum

  • 2" to 8" Substrates

  • Barrel/Batch

  • End of process detection

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Wafer Bonding

  • Unique In-situ Alignment

  • Direct, Anodic, Glass Frit, Thermocompression, Adhesive, Eutectic, Cu-Cu, In-situ Chemistry

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Laser Solutions

  • Modular design

  • IR or UV laser

  • Integrated cleaning

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Lift Off

  • Chemical Lift Off

  • Dry Film Lift Off