The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
The n&k Olympian Series is a DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
The OptiPrime-CD series are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements from 190nm–1000nm, with micro-spot technology.
The LittleFoot-CD Series are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology.
The OptiPrime-TF, OptiPrime-TF-M and LittleFoot-TF are DUV-Vis-NIR thin film only metrology systems, based on unpolarized Reflectance (R) measurements from 190nm to 1000nm with microspot technology.
The Gemini and Gemini-M are DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Scatterometers/Thin Film Metrology Systems specifically designed for measurements of Conventional and EUV photomasks.
DATA STORAGE INDUSTRY
Disk Metrology : 1500-D
The 1500-D measures unpolarized reflectance (R) to determine the optical properties (n and k) from 190nm – 1000nm, and thicknesses of thin films, in particular diamond-like carbon (DLC) and magnetic layers, comprising hard disks.